Soane, D.S.  <br/><br/>
Polymers in microelectronics: Fundamentals and applications  (Book) 

 - Amsterdam  Elsevier  1989 
 - 308p.  28 cm. 
<br/><br/><label>ISBN: </label>0444872906 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials Polymers
<br/><br/><label>Universal Decimal Class. No.: </label>678.06:621.38 SOA  / 2447