TY  - BOOK
AU  - Soane, D.S. 
AU  - Martynenko, Z.
TI  - Polymers in microelectronics: Fundamentals and applications
SN  - 0444872906
PY  - 1989///
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectronics--Materials Polymers
ER  -